Multi-Position・Motor Drive・Compact Gate Valve MEX-LD-MP Series
Our original drive system has superior cost performance
1.Low-price Automatic pressure control is made low-priced
2.High-performance Adopt high performance servomotor and new driven mechanism
3.High-functionality Full closing, Multi-position control, Auto pressure control
Motor position-selected （three-position）
select from three types
MEX-LD-MP-R
MEX-LD-MP-L
MEX-LD-MP-F
Features
◇ Full closing (shut-off valve) and conductance adjustment can be done by one unit.
◆ The stop position accuracy can be reproduced easily by adopting “Highly precise Gear head”.
◇ This valve can be stopped at any position of maximum 14- position and at the fully closed, fully open.
Positioning settings can be done easily with the teaching box or PC software.
◆ By adding optional components for control, automatic pressure control valve can be used as.
◇ The valve disc position can be confirmed from the outside by its angle indicator.
◆ The ability to select the motor position can be flexible to a variety of layouts, and utilize the space to
install the exhaust system.
◇ Fully closed and fully open position detecting sensor can be equipped as an option.
Basic specification
| STD FLANGE | ＪＩＳ・ＩＳＯ・ＣＦ |
|---|---|
| Leak Rate | Housing １×１０-11 Ｐａ ｍ3／ｓ ＞ Valve seat １×１０-10 Ｐａ ｍ3／ｓ ＞ |
| Pressure Range | １０5～１０-6 Ｐａ |
| Stem Seal | Viton O-ring |
| Diameter | ７０～４００（ｍｍ） |
|---|---|
| Power Power supply Control power |
ＤＣ２４Ｖ （max 3.0A ） ＤＣ２４Ｖ （max 3.0A ） |
| Driven mechanism | AC servo-motor （built-in encoder） |
| Main material | ＳＵＳ３０４ |
※ Subject to change without any notice
※ Please contact us as we can manufacture special sizes and special specifications.
※ The diameter is limited to the mounting direction. Please inquire our sales.
※To improve this specification may change without notice.
System configuration
※ Included in the valve unit：Valve body、Servo-motor、Servo-amplifier
（Please refer to the “optional selection list” other than those above.）
Equipped sevo-amplifier dimensions
About the motor correspondence of those other than a standard
We will consult also about change on motors according to the equipment usage environment of your company, such as servo motors other than a standard motor.
Example of correspondence：Mitsubishi Electric’s AC servo motor MR-J3 series and MR-J4 series etc.
Dimensions of MEX-JIS-LD Series
Unit in: mm
|
Model |
MEX-80JIS-LD-MP-( ) |
MEX-100JIS-LD-MP-( ) |
MEX-150JIS-LD-MP-( ) |
MEX-200JIS-LD-MP-( ) |
MEX-250JIS-LD-MP-( ) |
MEX-300JIS-LD-MP-( ) |
MEX-350JIS-LD-MP-( ) |
MEX-400JIS-LD-MP-( ) |
|
Diameter |
80 |
100 |
150 |
200 |
250 |
300 |
350 |
400 |
|
MOD No |
16709□□ |
16710□□ |
16711□□ |
16712□□ |
16713□□ |
16714□□ |
16714□□ |
16715□□ |
|
A |
70 |
70 |
80 |
80 |
85 |
85 |
100 |
100 |
|
B |
80 |
100 |
150 |
200 |
250 |
300 |
350 |
400 |
|
D |
160 |
185 |
235 |
300 |
350 |
400 |
450 |
520 |
|
n—E |
4-M10 |
8-M10 |
8-M10 |
8-M12 |
12-M12 |
12-M12 |
12-M12 |
12-M16 |
|
F |
14 |
14 |
14 |
15 |
16 |
16 |
18 |
18 |
|
G |
135 |
160 |
210 |
270 |
320 |
370 |
420 |
480 |
|
H |
314.5 |
314.5 |
401.5 |
541 |
654 |
752 |
916 |
1023 |
|
J |
150 |
150 |
192 |
254 |
305 |
356 |
433 |
483 |
|
L |
245 |
245 |
245 |
262 |
262 |
262 |
289.5 |
289.5 |
|
M |
105 |
105 |
105 |
116 |
120 |
121 |
106 |
107 |
|
Q |
174 |
174 |
174 |
192 |
196 |
197 |
204 |
205 |
|
R |
110 |
110 |
110 |
140 |
140 |
140 |
140 |
140 |
|
T |
180 |
180 |
235 |
308 |
380 |
430 |
512 |
560 |
|
U |
158 |
158 |
210 |
284 |
348 |
402 |
480 |
528 |
|
V |
60 |
60 |
60 |
60 |
72 |
72 |
80 |
82 |
|
W |
79 |
79 |
99 |
135 |
165 |
190 |
231 |
255 |
Note1：The above Flanges are accordance with older JIS B2290 Vacuum Flange for Vacuum Equipment (Flange for affiliated book maintenance）
Note2：A motor position type enters in ( ) of form. (It chooses from three positions)
Note3：An attachment posture is limited depending on a diameter. Please ask to business for details.
Note4：Be careful for more than the screw depth of a flange not to screw in the screw for valve attachment.
Dimensions of MEX-ISO-LD Series
Unit in: mm
|
Model |
MEX-80ISO- LD-MP-( ) |
MEX-100ISO- LD-MP-( ) |
MEX-150ISO- LD-MP-( ) |
MEX-200ISO- LD-MP-( ) |
MEX-250ISO- LD-MP-( ) |
MEX-300ISO- LD-MP-( ) |
MEX-400ISO- LD-MP-( ) |
|
Diameter |
80 |
100 |
150 |
200 |
250 |
300 |
400 |
|
MOD No |
16767□□ |
16768□□ |
16770□□ |
16771□□ |
16772□□ |
16773□□ |
16774□□ |
|
A |
70 |
70 |
80 |
80 |
85 |
85 |
100 |
|
B |
80 |
100 |
150 |
200 |
250 |
300 |
400 |
|
C |
83 |
102 |
153 |
213 |
261 |
318 |
400 |
|
D |
145 |
165 |
225 |
285 |
335 |
425 |
510 |
|
n—E |
8-M8 |
8-M8 |
8-M10 |
12-M10 |
12-M10 |
12-M12 |
16-M12 |
|
F |
14 |
14 |
14 |
15 |
16 |
16 |
18 |
|
G |
125 |
145 |
200 |
260 |
310 |
395 |
480 |
|
H |
314.5 |
314.5 |
401.5 |
541 |
654 |
752 |
1023 |
|
J |
150 |
150 |
192 |
254 |
305 |
356 |
483 |
|
L |
245 |
245 |
245 |
262 |
262 |
262 |
289.5 |
|
M |
105 |
105 |
105 |
116 |
120 |
121 |
107 |
|
Q |
174 |
174 |
174 |
192 |
196 |
197 |
205 |
|
R |
110 |
110 |
110 |
140 |
140 |
140 |
140 |
|
T |
180 |
180 |
235 |
308 |
380 |
430 |
560 |
|
U |
158 |
158 |
210 |
284 |
348 |
402 |
528 |
|
V |
60 |
60 |
60 |
60 |
72 |
72 |
82 |
|
W |
79 |
79 |
99 |
135 |
165 |
190 |
255 |
Note1：The above Flanges are accordance with ISO 1609 Vacuum technology Flange
Note2：A motor position type enters in () of form. (It chooses from three positions)
Note3：An attachment posture is limited depending on a diameter. Please ask to business for details.
Note4：Be careful for more than the screw depth of a flange not to screw in the screw for valve attachment.
Dimensions of MEX-CF-LD Series
Unit in: mm
|
Model |
MEX-70CF- LD-MP-( ) |
MEX-100CF- LD-MP-( ) |
MEX-150CF- LD-MP-( ) |
MEX-200CF- LD-MP-( ) |
MEX-250CF- LD-MP-( ) |
|
Diameter |
70 |
100 |
150 |
200 |
250 |
|
MOD No |
16743□□ |
16744□□ |
16745□□ |
16746□□ |
16747□□ |
|
CFflange size |
CF114 |
CF152 |
CF203 |
CF253 |
CF305 |
|
A |
70 |
70 |
80 |
80 |
100 |
|
B |
70 |
100 |
150 |
200 |
250 |
|
D |
113.5 |
151.6 |
202.4 |
253.2 |
306 |
|
n—E |
8-M8 |
16-M8 |
20-M8 |
24-M8 |
32-M8 |
|
F |
14 |
14 |
14 |
16 |
23 |
|
G |
92.1 |
130.2 |
181 |
231.8 |
284 |
|
H |
314.5 |
314.5 |
401.5 |
541 |
654 |
|
J |
150 |
150 |
192 |
254 |
305 |
|
L |
245 |
245 |
245 |
262 |
262 |
|
M |
105 |
105 |
105 |
116 |
120 |
|
Q |
174 |
174 |
174 |
192 |
196 |
|
R |
110 |
110 |
110 |
140 |
140 |
|
T |
180 |
180 |
235 |
308 |
380 |
|
U |
158 |
158 |
210 |
284 |
348 |
|
V |
60 |
60 |
60 |
60 |
72 |
|
W |
79 |
79 |
99 |
135 |
165 |
Note1 The above Flanges are accordance with ISO 3669 Vacuum technology-Bakable Flange
Note2：A motor position type enters in () of form. (It chooses from three positions)
Note3：An attachment posture is limited depending on a diameter. Please ask to business for details.
Note4：Be careful for more than the screw depth of a flange not to screw in the screw for valve attachment.
＜Option＞MBV-LDⅡ-MP (Multi-position control)
１．Motor encoder extension cable
Cables for connecting the servo amplifier and valveModel No. length（Ｌ） MOT/ENC cable_4122202(1m) 1m MOT/ENC cable_4122204(2m) 2m MOT/ENC cable_4122206(3m) 3m MOT/ENC cable_4122208(4m) 4m MOT/ENC cable_4122210(5m) 5m MOT/ENC cable_4122218(6m) 9m MOT/ENC cable_4122220(10m) 10m MOT/ENC cable_4122230(15m) 15m MOT/ENC cable_4122240(20m) 20m 
Motor cable
Encoder cable２．Power parallel cable
Cable for power supply to servo amplifierModel No. length（Ｌ） Power parallel cable _4122306 (3m) 3m Power parallel cable _4122310 (5m) 5m Power parallel cable _4122320 (10m) 10m 
３．－１ PC software
Model No. Remarks TBVST-CTC-JP-SET_4122040 Japanese version TBVST-CTC-EN-SET_4122041 English version 【PC software Standard set accessories】
① ADP-1（Conversion adapter)
② ADP-2-4（Connector converter）
③ SIO cable （1m）
④ ADP cable （1m）
３．－２Teaching box
Model No. Remarks CTA-23-SET_4122070 Digital indication 【Teaching box Standard set accessories】
① ADP cable （1m）※The case lack of the connection length by a standard set accessory cable of 3-1 and 3-2 common option
(1m), Please select the cable length of the table below .（option）
SIO cable Model length（Ｌ） SIO cable _4120606 (3m) 3m SIO cable _4120610 (5m) 5m 
ADP cable Model length（Ｌ） ADP cable_4122406 (3m) 3m ADP cable_4122410 (5m) 5m ADP cable_4122420 (10m) 10m 