Multi-Position Motor Drive ・ Compact Gate Valve MEX-LD-AZ Series

MEX-LD-AZ Series

Our original drive system has superior cost performance

1．Low-price Automatic pressure control is made low-priced
2．High-performance Adopt high performance stepping motor and driver
3．High-functionality Full closing, Multi-position control, Auto pressure control
ABZO sensor enables battery-less absolute system
Motor position-selected （three-position）

select from three types

MEX-LD-AZ-R

MEX-LD-AZ-L

MEX-LD-AZ-F

Features

  • Full closing (shut-off valve) and conductance adjustment can be done by one unit.
  • The stop position accuracy can be reproduced easily by adopting “Highly precise Gear head”.
  • This valve can be stopped at any position of maximum 14- position and at the fully closed, fully open.
    Position settings are available from the support source. Can be easily installed on a PC.
  • By adding optional components for control, automatic pressure control valve can be used as.
  • The valve disc position can be confirmed from the outside by its angle indicator.
  • The ability to select the motor position can be flexible to a variety of layouts, and utilize the space to install the exhaust system.
  • Fully closed and fully open position detecting sensor can be equipped as an option

Basic specification

STD FLANGE ＪＩＳ・ＩＳＯ・ＣＦ
Leak Rate Housing
１×１０-11　Ｐａ・ｍ3／ｓ ＞
Valve seat
１×１０-10　Ｐａ・ｍ3／ｓ ＞
Pressure Range １０5　～　１０-6　Ｐａ
Stem Seal Viton O-ring
Main Material ＳＵＳ３０４
Diameter ７０ ～ ４００（ｍｍ）
Control system Hybrid control system αSTEP ※1
Power Specifications DC power supply
DC24V/DC48V　3.45A（3.7A）※3
AC power supply ※2
Single-phase AC 100-120V 5.4 A
Single-phase AC 200-240V 3.3A
Three-phase AC 200-240V 2.0A
  • Subject to change without any notice
  • Please contact us as we can manufacture special sizes and special specifications.
  • The diameter is limited to the mounting direction. Please inquire our sales.

※1　Hybrid control system αSTEP: Original control of Oriental Motor Co., Ltd. that combines the advantages of “open
loop control” and “closed loop control”.
※2 　A driver with AC power supply specifications requires a separate DC24V 0.25A (0.5A) * 3 as a power supply for the
control circuit.
※3 　( ) Is the current value when using a motor with a brake.

Valve model

◆Standard motor specifications
・MEX-□-LD-AZ-△-KD　　Power input：DC24V/DC48V
・MEX-□-LD-AZ-△-AD　　Power input：AC single-phase 100-120V
・MEX-□-LD-AZ-△-CD　　Power input：AC single-phase / three-phase 200-240V

◆Motor specifications with brake
・MEX-□-LD-AZBr-△-KD　　Power input：DC24V/DC48V
・MEX-□-LD-AZBr-△-AD　　Power input：AC single-phase 100-120V
・MEX-□-LD-AZBr-△-CD　　Power input：AC single-phase / three-phase 200-240V

□：Flange type and diameter　　　△：Motor position (R / L / F)

System configuration

System configuration

※Included in the valve unit:Valve body, motor, driver

Attached driver dimensional drawing

Attached driver dimensional drawing

Dimensions of MEX-JIS-LD-AZ Series

Dimensions of MEX-JIS-LD-AZ Series
Unit in:mm
Diameter 80 100 150 200 250 300 350 400
MOD No 16709□□ 16710□□ 16711□□ 16712□□ 16713□□ 16714□□ 16714□□ 16715□□
Model MEX-80JIS-LD-AZ-□□ MEX-100JIS-LD- AZ-□□ MEX-150JIS-LD- AZ-□□ MEX-200JIS-LD- AZ-□□ MEX-250JIS-LD- AZ-□□ MEX-300JIS-LD- AZ-□□ MEX-350JIS-LD- AZ-□□ MEX-400JIS-LD- AZ-□□
A 70 70 80 80 85 85 100 100
B 80 100 150 200 250 300 350 400
D 160 185 235 300 350 400 450 520
n—E 4-M10 8-M10 8-M10 8-M12 12-M12 12-M12 12-M12 12-M16
F 14 14 14 15 16 16 18 18
G 135 160 210 270 320 370 420 480
H 314.5 314.5 401.5 541 654 752 916 1023
J 150 150 192 254 305 356 433 483
L 271.5 271.5 271.5 288.5 288.5 288.5 288.5 288.5
M 105 105 105 116 120 121 128 129
Q 174 174 174 192 196 197 204 205
R 110 110 110 140 140 140 140 140
T 180 180 235 308 380 430 512 560
U 158 158 210 284 348 402 480 528
V 60 60 60 60 72 72 80 82
W 79 79 99 135 165 190 231 255

Note1：The above Flanges are accordance with older JIS B2290 Vacuum Flange for Vacuum Equipment (Flange for
affiliated book maintenance）
Note2：A motor position type enters in () of form. (It chooses from three positions)
Note3：An attachment posture is limited depending on a diameter. Please ask to business for details.
Note4：Be careful for more than the screw depth of a flange not to screw in the screw for valve attachment.
※To im prove this specification may change without notice.

Dimensions of MEX-ISO-LD-AZ Series

Dimensions of MEX-ISO-LD-AZ Series
Unit in:mm
Diameter 80 100 150 200 250 300 400
MOD No 16767□□ 16768□□ 16770□□ 16771□□ 16772□□ 16773□□ 16774□□
Model MEX-80ISO-LD- AZ-□□ MEX-100ISO-LD- AZ-□□ MEX-150ISO-LD- AZ-□□ MEX-200ISO-LD- AZ-□□ MEX-250ISO-LD- AZ-□□ MEX-300ISO-LD- AZ-□□ MEX-400ISO-LD- AZ-□□
A 70 70 80 80 85 85 100
B 80 100 150 200 250 300 400
C 83 102 153 213 261 318 400
D 145 165 225 285 335 425 510
n—E 8-M8 8-M8 8-M10 12-M10 12-M10 12-M12 16-M12
F 14 14 14 15 16 16 18
G 125 145 200 260 310 395 480
H 314.5 314.5 401.5 541 654 752 1023
J 150 150 192 254 305 356 483
L 271.5 271.5 271.5 288.5 288.5 288.5 288.5
M 105 105 105 116 120 121 129
Q 174 174 174 192 196 197 205
R 110 110 110 140 140 140 140
T 180 180 235 308 380 430 560
U 158 158 210 284 348 402 528
V 60 60 60 60 72 72 82
W 79 79 99 135 165 190 255

Note1：The above Flanges are accordance with ISO 1609 Vacuum technology Flange
Note2：A motor position type enters in () of form. (It chooses from three positions)
Note3：An attachment posture is limited depending on a diameter. Please ask to business for details.
Note4：Be careful for more than the screw depth of a flange not to screw in the screw for valve attachment.
※To improve this specification may change without notice.

Dimensions of MEX-CF-LD-AZ Series

Dimensions of MEX-CF-LD-AZ Series
Unit in:mm
Diameter 70 100 150 200 250
MOD No 16743□□ 16744□□ 16745□□ 16746□□ 16747□□
Model MEX-70CF-LD- AZ-□□ MEX-100CF-LD- AZ-□□ MEX-150CF-LD- AZ-□□ MEX-200CF-LD- AZ-□□ MEX-250CF-LD- AZ-□□
CF flange nominal CF114 CF152 CF203 CF253 CF305
A 70 70 80 80 100
B 70 100 150 200 250
D 113.5 151.6 202.4 253.2 306
n—E 8-M8 16-M8 20-M8 24-M8 32-M8
F 14 14 14 16 23
G 92.1 130.2 181 231.8 284
H 314.5 314.5 401.5 541 654
J 150 150 192 254 305
L 271.5 271.5 271.5 288.5 288.5
M 105 105 105 116 120
Q 174 174 174 192 196
R 110 110 110 140 140
T 180 180 235 308 380
U 158 158 210 284 348
V 60 60 60 60 72
W 79 79 99 135 165

Note1：The above Flanges are accordance with ISO 3669 Vacuum technology-Bakable Flange
Note2：A motor position type enters in () of form. (It chooses from three positions)
Note3：An attachment posture is limited depending on a diameter. Please ask to business for details.
Note4：Be careful for more than the screw depth of a flange not to screw in the screw for valve
attachment.
※To improve this specification may change without notice.

Dimensions of MEX-JIS-LD-AZBr Series

Dimensions of MEX-JIS-LD-AZBr Series
Unit in:mm
Diameter 80 100 150 200 250 300 350 400
MOD No 16709□□ 16710□□ 16711□□ 16712□□ 16713□□ 16714□□ 16714□□ 16715□□
Model MEX-80JIS-LD-AZBr-□□ MEX-100JIS-LD-AZBr-□□ MEX-150JIS-LD-AZBr-□□ MEX-200JIS-LD-AZBr-□□ MEX-250JIS-LD-AZBr-□□ MEX-300JIS-LD-AZBr-□□ MEX-350JIS-LD-AZBr-□□ MEX-400JIS-LD-AZBr-□□
A 70 70 80 80 85 85 100 100
B 80 100 150 200 250 300 350 400
D 160 185 235 300 350 400 450 520
n—E 4-M10 8-M10 8-M10 8-M12 12-M12 12-M12 12-M12 12-M16
F 14 14 14 15 16 16 18 18
G 135 160 210 270 320 370 420 480
H 314.5 314.5 401.5 541 654 752 916 1023
J 150 150 192 254 305 356 433 483
L 317.5 317.5 317.5 334.5 334.5 334.5 334.5 334.5
M 105 105 105 116 120 121 128 129
Q 174 174 174 192 196 197 204 205
R 110 110 110 140 140 140 140 140
T 180 180 235 308 380 430 512 560
U 158 158 210 284 348 402 480 528
V 60 60 60 60 72 72 80 82
W 79 79 99 135 165 190 231 255

Note1：The above Flanges are accordance with older JIS B2290 Vacuum Flange for Vacuum Equipment (Flange for
affiliated book maintenance）
Note2：A motor position type enters in () of form. (It chooses from three positions)
Note3：An attachment posture is limited depending on a diameter. Please ask to business for details.
Note4：Be careful for more than the screw depth of a flange not to screw in the screw for valve attachment.
※To im prove this specification may change without notice.

Dimensions of MEX-ISO-LD-AZBr Series

Dimensions of MEX-ISO-LD-AZBr Series
Unit in:mm
Diameter 80 100 150 200 250 300 400
MOD No 16767□□ 16768□□ 16770□□ 16771□□ 16772□□ 16773□□ 16774□□
Model MEX-80ISO-LD-AZBr-□□ MEX-100ISO-LD-AZBr-□□ MEX-150ISO-LD-AZBr-□□ MEX-200ISO-LD-AZBr-□□ MEX-250ISO-LD-AZBr-□□ MEX-300ISO-LD-AZBr-□□ MEX-400ISO-LD-AZBr-□□
A 70 70 80 80 85 85 100
B 80 100 150 200 250 300 400
C 83 102 153 213 261 318 400
D 145 165 225 285 335 425 510
n—E 8-M8 8-M8 8-M10 12-M10 12-M10 12-M12 16-M12
F 14 14 14 15 16 16 18
G 125 145 200 260 310 395 480
H 314.5 314.5 401.5 541 654 752 1023
J 150 150 192 254 305 356 483
L 317.5 317.5 317.5 334.5 334.5 334.5 334.5
M 105 105 105 116 120 121 129
Q 174 174 174 192 196 197 205
R 110 110 110 140 140 140 140
T 180 180 235 308 380 430 560
U 158 158 210 284 348 402 528
V 60 60 60 60 72 72 82
W 79 79 99 135 165 190 255

Note1：The above Flanges are accordance with ISO 1609 Vacuum technology Flange
Note2：A motor position type enters in () of form. (It chooses from three positions)
Note3：An attachment posture is limited depending on a diameter. Please ask to business for details.
Note4：Be careful for more than the screw depth of a flange not to screw in the screw for valve attachment.
※To improve this specification may change without notice.

Dimensions of MEX-CF-LD-AZBr Series

Dimensions of MEX-CF-LD-AZBr Series
Unit in:mm
Diameter 70 100 150 200 250
MOD No 16743□□ 16744□□ 16745□□ 16746□□ 16747□□
Model MEX-70CF-LD-AZBr-□□ MEX-100CF-LD-AZBr-□□ MEX-150CF-LD-AZBr-□□ MEX-200CF-LD-AZBr-□□ MEX-250CF-LD-AZBr-□□
CF flange nominal CF114 CF152 CF203 CF253 CF305
A 70 70 80 80 100
B 70 100 150 200 250
D 113.5 151.6 202.4 253.2 306
n—E 8-M8 16-M8 20-M8 24-M8 32-M8
F 14 14 14 16 23
G 92.1 130.2 181 231.8 284
H 314.5 314.5 401.5 541 654
J 150 150 192 254 305
L 317.5 317.5 317.5 334.5 334.5
M 105 105 105 116 120
Q 174 174 174 192 196
R 110 110 110 140 140
T 180 180 235 308 380
U 158 158 210 284 348
V 60 60 60 60 72
W 79 79 99 135 165

Note1 The above Flanges are accordance with ISO 3669 Vacuum technology-Bakable Flange
Note2：A motor position type enters in () of form. (It chooses from three positions)
Note3：An attachment posture is limited depending on a diameter. Please ask to business for details.
Note4：Be careful for more than the screw depth of a flange not to screw in the screw for valve
attachment.
※To improve this specification may change without notice.

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