High-Performance Motor Drive Butterfly Valves MBV-SDⅡ-AZ Series

Long-life, Low-price, High performance, Versatile running patterns
1. Long-life 1,000,000 cycles
2. Low-price Automatic pressure control is made low-priced
3. High-performance Employs a high-performance stepping motor driver
4. High-functionality Leakage (*Note.1) , Multi-position control, Auto pressure control Motor position-selected (four-position) Equipped with an ABZO sensor, realizing a battery-less absolute system
If the minimum conductance is required, the specification with valve disc O-ring is also available.(However, it cannot be used as a shut valve.)
5.Minimum Diameter 20A, Available from NW25 size. Only 20A NW25 size can be used as a shut valve.
Note 1) Leakage specification: No valve seal mechanism
Characteristic
- The series of MBV-SDⅡ-M4-ARJ of the valve which is compatible with the low cost is a motor-driven butterfly valve of conductance control exclusive use without valve disc O-ring.
- A stepping motor made by Oriental Motor is used as the drive source for the valve body.The valve disc can be stopped and hold at fully-closed, fully –open and other any position.
- It is multi-stage and can change the opening area of the valve and can use it in wide uses such as the pressure variableness before and after the constant pressure maintenance in the vacuum chamber and the valve or variableness of the exhaust conductance.
- In addition to fully closed and fully open, it can be stopped at any position of up to 14 positions. Position setting can be easily performed by installing support software on a PC.
- Reproducibility often stops in a set position by sending a signal from a host system of PLC etc.
- By combining the dual automatic pressure control system controller of an option with FPC series, the variegated control including automatic pressure control is attained.
Main specification
STD FLANGE | JIS・ISO・CF・NW |
---|---|
Leak Rate | 1×10-9 Pa・m3/s > |
Pressure Range | 105 ~ 10-6 Pa |
Disk seal | None (Leakage type) Viton O-ring(Full closed type:NW25) |
Shaft seal | Viton O-ring two-tier |
Gas contact material |
SUS304 |
Diameter | 20A ~ 100A |
---|---|
Driven mechanism |
Hybrid control system αSTEP Note 1) |
Power | DC power supply DC24V/DC48V 3.45A AC power supply Note 2) Single-phase AC100-120V 5.4A Single-phase AC200-240V 3.3A Three-phase AC200-240V 2.0A |
Note 1) Hybrid control system αSTEP: Oriental Motor’s unique control that combines the advantages of “openloop control” and “closed-loop control”
Note 2) Drivers with AC power specifications require a separate DC24V (0.25A) power supply for the control circuit.
System configuration

※Included in the valve unit:Valve body、stepping motor、driver
Attachment driver dimensional drawing

Valve model
・MBV-SDⅡ-AZ-KD Power input:DC24V/DC48V
・MBV-SDⅡ-AZ-AD Power input:Single-phase AC100-120V
・MBV-SDⅡ-AZ-CD Power input:Single-phase/Three-phase AC 200-240V
Dimensions of MBV-JIS SDⅡ-AZ Series

Unit in:mm | |||||
Model | MBV-1SDⅡ-AZ-□□ | MBV-2SDⅡ- AZ-□□ | MBV-2.5SDⅡ- AZ-□□ | MBV-3SDⅡ-AZ-□□ | MBV-4SDⅡ-AZ-□□ |
MOD No. | 10805□□ | 10807□□ | 10808□□ | 10809□□ | 10810□□ |
A | 20 | 20 | 20 | 20 | 20 |
B | 34 | 52 | 68 | 81 | 104 |
C | 58 | 88 | 105 | 120 | 145 |
D | 90 | 120 | 145 | 160 | 185 |
n—E | 4-φ10 | 4-φ10 | 4-φ12 | 4-φ12 | 8-φ12 |
F | 70 | 100 | 120 | 135 | 160 |
G | 33 | 52 | 67 | 80 | 102 |
H | 241 | 271.5 | 297 | 311 | 336.5 |
J | 100.5 | 115.5 | 128 | 135.5 | 148 |
K | 43 | 58.5 | 71.5 | 78 | 91 |
L | 90 | 90 | 90 | 90 | 102 |
P | 40 | 70 | 85 | 100 | 120 |
V | V40 | V70 | V85 | V100 | V120 |
Note1:The above Flanges are accordance with older JIS B2290 Vacuum Flange for Vacuum Equipment (Flange for affiliated book maintenance)
※ To improve this specification may change without notice.
Dimensions of MBV-ISO SDⅡ-AZ Series

Unit in:mm | |||||
Model | MBV-ISO40SDⅡ-AZ-□□ | MBV-ISO50SDⅡ-AZ-□□ | MBV-ISO63SDⅡ-AZ-□□ | MBV-ISO80SDⅡ-AZ-□□ | MBV-ISO100SDⅡ-AZ-□□ |
MOD No. | 10865□□ | 10866□□ | 10867□□ | 10867□□ | 10868□□ |
A | 30 | 30 | 30 | 30 | 30 |
B | 34 | 52 | 68 | 81 | 104 |
C | 100 | 110 | 130 | 145 | 165 |
D | 120 | 120 | 145 | 160 | 185 |
n—E | 4-φ9 | 4-φ9 | 4-φ9 | 8-φ9 | 8-φ9 |
F | 80 | 90 | 110 | 125 | 145 |
G | 23 | 47 | 62 | 76 | 100 |
H | 271.5 | 271.5 | 297 | 311 | 336.5 |
J | 115.5 | 115.5 | 128 | 135.5 | 148 |
K | 58.5 | 58.5 | 71.5 | 78 | 91 |
L | 90 | 90 | 90 | 90 | 102 |
Note1:The above Flanges are accordance with ISO 1609 Vacuum technology Flange
※ To improve this specification may change without notice.
Dimensions of MBV-CF SDⅡ-AZ Series

Unit in:mm | ||||
Model | MBV-CF40SDⅡ-AZ-□□ | MBV-CF40SDⅡ-AZ-□□ | MBV-CF63SDⅡ-AZ-□□ | MBV-CF100SDⅡ-AZ-□□ |
MOD No. | 10840□□ | 10840□□ | 10842□□ | 10844□□ |
A | 30 | 30 | 30 | 30 |
B | 23 | 34 | 52 | 104 |
C | 69.4 | 69.4 | 113.5 | 151.6 |
D | 80 | 90 | 120 | 185 |
n—E | 6-M6 | 6-M6 | 8-M8 | 16-M8 |
F | 58.7 | 58.7 | 92.1 | 130.2 |
G | 0 | 23 | 47 | 100 |
H | 231 | 241 | 271.5 | 336.5 |
J | 95.5 | 100.5 | 115.5 | 148 |
K | 38 | 43 | 58.5 | 91 |
L | 90 | 90 | 90 | 102 |
Note1:The above Flanges are accordance with ISO/TS 3669-2 Vacuum technology-Bakable flanges-Part2:Dimension of knife-edge flanges
Note2:No Groove for leakage detection no CF 40
Dimensions of MBV-NW SDⅡ-AZ Series

Unit in:mm | ||||||
Model | MBV-NW25SDⅡ-AZ-□□ | MBV-NW40SDⅡ-AZ-□□ | MBV-NW50SDⅡ-AZ-□□ | MBV-NW63SDⅡ-AZ-□□ | MBV-NW80SDⅡ-AZ-□□ | MBV-NW100SDⅡ-AZ-□□ |
MOD No. | 10822□□ | 10824□□ | 10825□□ | 10826□□ | 10827□□ | 10828□□ |
A | 40 | 40 | 40 | 40 | 60 | 60 |
B | 23 | 34 | 52 | 68 | 81 | 104 |
D | 40 | 55 | 75 | 87 | 114 | 134 |
G | 0 | 0 | 36 | 56 | 55 | 84 |
H | 231 | 241 | 271.5 | 297 | 311 | 336.5 |
J | 95.5 | 100.5 | 115.5 | 128 | 135.5 | 148 |
K | 38 | 43 | 58.5 | 71.5 | 78 | 91 |
L | 90 | 90 | 90 | 90 | 90 | 102 |
Note1:A fully closed type is prepared for NW25 size.
Note2:When installing, use Fuji Technology made Multi-Clump. In case of using other Clumps, there are some cases where installing is impossible owing to their shape.
※ To improve this specification may change without notice.