Motor Driven Butterfly Valve MBV-LDⅡ-MP Series
Long-life, Low-price, High performance, Versatile running patterns
1.Long-life 1,000,000 cycles and two years guarantee
2.Low-price Automatic pressure control is made low-priced
3.High-performance Adopt high performance servomotor and new driven mechanism
4.High-functionality Full closing, Multi-position control, Auto pressure control
Motor position-selected (four-position)
select from four types
MBV-LDⅡ-MP-R
MBV-LDⅡ-MP-L
MBV-LDⅡ-MP-F
BV-LDⅡ-MP-B
Features
◇ Full closing (shut-off valve) and conductance adjustment can be done by one unit.
Minimum conductance-controlled is possible.
◆ This valve can easily be opened under a differential pressure condition of vacuum-atmospheric pressure.
◇ The stop position accuracy can be reproduced easily by adopting “Highly precise Gear head”.
◆ This valve can be stopped at any position of maximum 14- position and at the fully closed, fully open.
Positioning settings can be done easily with the teaching box or PC software.
◇ By adding optional components for control, automatic pressure control valve can be used as.
◆ The valve disc position can be confirmed from the outside by its angle indicator.
◇ The ability to select the motor position can be flexible to a variety of layouts, and utilize the space to install
the exhaust system.
◆ Fully closed position detecting sensor be included as standard.
Basic specification
STD FLANGE | JIS・ISO・CF・NW |
---|---|
Leak Rate | 1×10-9 Pa・m3/s > |
Pressure Range | 105~10-6 Pa |
Disc seal | Viton O-ring |
Shaft seal | Viton O-ring two-tier |
Diameter | 25A ~ 300A |
---|---|
Power | supply:DC 24V(max 3.0A ) control:DC 24V(max 0.2A )) |
Driven mechanism | AC servo-motor |
Gas contact material |
SUS304 |
※ Subject to change without any notice
※ Please contact us as we can manufacture special sizes and special specifications.
※ To improve this specification may change without notice.
System configuration
※Included in the valve unit:Valve body、Servo-motor、Servo-amplifier
(Please refer to the “optional selection list” other than those above.)
Equipped sevo-amplifier dimensions
About the motor correspondence of those other than a standard
We will consult also about change on motors according to the equipment usage environment of your company, such as servo motors other than a standard motor.
Example of correspondence:
Mitsubishi Electric’s AC servo motor MR-J4 series etc.
Yaskawa Electric’s AC servoΣ-7series etc.
Dimensions of MBV-JIS LDⅡ-MP Series
Unit in:mm | |||||||||
Model | MBV-1LDⅡ- MP-( ) | MBV-2LDⅡ- MP-( ) | MBV-2.5LDⅡ- MP-( ) | MBV-3LDⅡ- MP-( ) | MBV-4LDⅡ- MP-( ) | MBV-6LDⅡ- MP-( ) | MBV-8LDⅡ- MP-( ) | MBV-10LDⅡ- MP-( ) | MBV-12LDⅡ- MP-( ) |
MOD No. | 10705□□ | 10707□□ | 10708□□ | 10709□□ | 10710□□ | 10711□□ | 10712□□ | 10713□□ | 10714□□ |
A | 20 | 20 | 20 | 20 | 20 | 26 | 40 | 40 | 45 |
B | 34 | 52 | 68 | 81 | 104 | 158 | 209 | 258 | 308 |
C | 58 | 88 | 105 | 120 | 145 | 190 | 250 | 302 | 352 |
D | 90 | 120 | 145 | 160 | 185 | 235 | 300 | 350 | 400 |
n—E | 4-φ10 | 4-φ10 | 4-φ12 | 4-φ12 | 8-φ12 | 8-φ12 | 8-φ15 | 12-φ15 | 12-φ15 |
F | 70 | 100 | 120 | 135 | 160 | 210 | 270 | 320 | 370 |
G | 33 | 52 | 67 | 80 | 102 | 154 | 206 | 254 | 303 |
H | 228.5 | 259 | 284.5 | 298.5 | 324 | 388 | 455 | 505 | 555 |
J | 115.5 | 130.5 | 143 | 150.5 | 163 | 194 | 229 | 254 | 279 |
K | 43 | 58.5 | 71.5 | 78 | 91 | 116.5 | 148.5 | 173.5 | 198.5 |
L | 55 | 55 | 49 | 49 | 55 | 70 | 85 | 85 | 85 |
M | 245 | 245 | 246 | 246 | 246.5 | 264 | 292 | 292.5 | 292.5 |
P | 40 | 70 | 85 | 100 | 120 | 175 | 225 | 275 | 325 |
Q | 5 | 5 | 5 | 5 | 5 | 5 | 8 | 8 | 8 |
R | 100 | 100 | 100 | 100 | 100 | 110 | 110 | 110 | 110 |
S | – | – | – | – | – | – | 22 | 22 | 22 |
V | V40 | V70 | V85 | V100 | V120 | V175 | V225 | V275 | V325 |
Note1:The above Flanges are accordance with older JIS B2290 Vacuum Flange for Vacuum Equipment (Flange for affiliated book maintenance)
Note2:A motor position type enters in ( ) of form. (It chooses from four positions)
Dimensions of MBV-ISO LDⅡ-MP Series
Uniin:mm | ||||||||
Model | MBV- ISO40LDⅡ- MP-( ) | MBV- ISO50LDⅡ- MP-( ) | MBV- ISO63LDⅡ- MP-( ) | MBV- ISO80LDⅡ- MP-( ) | MBV- ISO100LDⅡ- MP-( ) | MBV- ISO160LDⅡ- MP-( ) | MBV- ISO200LDⅡ- MP-( ) | MBV- ISO250LDⅡ- MP-( ) |
MOD No. | 10765□□ | 10766□□ | 10767□□ | 10767□□ | 10768□□ | 10770□□ | 10771□□ | 10772□□ |
A | 30 | 30 | 30 | 30 | 30 | 50 | 50 | 50 |
B | 34 | 52 | 68 | 81 | 104 | 158 | 209 | 258 |
C | 100 | 110 | 130 | 145 | 165 | 225 | 285 | 335 |
D | 120 | 120 | 145 | 160 | 185 | 235 | 300 | 350 |
n—E | 4-φ9 | 4-φ9 | 4-φ9 | 8-φ9 | 8-φ9 | 8-φ11 | 12-φ11 | 12-φ11 |
F | 80 | 90 | 110 | 125 | 145 | 200 | 260 | 310 |
G | 23 | 47 | 62 | 76 | 100 | 148 | 203 | 251 |
H | 259 | 259 | 284.5 | 298.5 | 324 | 388 | 455 | 505 |
J | 130.5 | 130.5 | 143 | 150.5 | 163 | 194 | 229 | 254 |
K | 58.5 | 58.5 | 71.5 | 78 | 91 | 116.5 | 148.5 | 173.5 |
L | 55 | 55 | 49 | 49 | 55 | 70 | 85 | 85 |
M | 245 | 245 | 246 | 246 | 246.5 | 264 | 292 | 292.5 |
R | 100 | 100 | 100 | 100 | 100 | 110 | 110 | 110 |
S | – | – | – | – | – | – | 22 | 22 |
Note1:The above Flanges are accordance with ISO 1609 Vacuum technology Flange
Note2:A motor position type enters in ( ) of form. (It chooses from four positions)
Dimensions of MBV-CF LDⅡ-MP Series
Unit in:mm | ||||||
Model | MBV- CF40LDⅡ- MP-( ) | MBV- CF63LDⅡ- MP-( ) | MBV- CF100LDⅡ- MP-( ) | MBV- CF160LDⅡ- MP-( ) | MBV- CF200LDⅡ- MP-( ) | MBV- CF250LDⅡ- MP-( ) |
MOD No. | 10740□□ | 10742□□ | 10744□□ | 10745□□ | 10747□□ | 10748□□ |
A | 30 | 30 | 30 | 50 | 50 | 50 |
B | 34 | 52 | 104 | 158 | 209 | 258 |
C | 69.4 | 113.5 | 151.6 | 202.4 | 253.2 | 305.0 |
D | 90 | 120 | 185 | 235 | 300 | 350 |
n—E | 6-M6 | 8-M8 | 16-M8 | 20-M8 | 24-M8 | 32-M8 |
F | 58.7 | 92.1 | 130.2 | 181 | 231.8 | 284 |
G | 23 | 47 | 100 | 148 | 203 | 251 |
H | 228.5 | 259 | 324 | 388 | 455 | 505 |
J | 115.5 | 130.5 | 163 | 194 | 229 | 254 |
K | 43 | 58.5 | 91 | 116.5 | 148.5 | 173.5 |
L | 55 | 55 | 55 | 70 | 85 | 85 |
M | 245 | 245 | 246.5 | 264 | 292 | 292.5 |
R | 100 | 100 | 100 | 110 | 110 | 110 |
S | – | – | – | – | 22 | 22 |
Note1:The above Flanges are accordance with ISO/TS 3669-2 Vacuum technology-Bakable flanges-Part2:Dimension of knife-edge flanges
Note2:A motor position type enters in ( ) of form. (It chooses from four positions)
Note3:No Groove for leakage detection no CF 40
Dimensions of MBV-NW LDⅡ-MP Series
Unit in:mm | ||||||
Model | MBV- NW40LDⅡ- MP-( ) | MBV- NW50LDⅡ- MP-( ) | MBV- NW63LDⅡ- MP-( ) | MBV- NW80LDⅡ- MP-( ) | MBV- NW100LDⅡ- MP-( ) | MBV- NW160LDⅡ- MP-( ) |
MOD No. | 10724□□ | 10725□□ | 10726□□ | 10727□□ | 10728□□ | 10730□□ |
A | 40 | 40 | 40 | 60 | 60 | 66 |
B | 34 | 52 | 68 | 81 | 104 | 158 |
D | 55 | 75 | 87 | 114 | 134 | 190 |
G | 0 | 36 | 56 | 55 | 84 | 140 |
H | 228.5 | 259 | 284.5 | 298.5 | 324 | 388 |
J | 115.5 | 130.5 | 143 | 150.5 | 163 | 194 |
K | 43 | 58.5 | 71.5 | 78 | 91 | 116.5 |
L | 55 | 55 | 49 | 49 | 55 | 70 |
M | 245 | 245 | 246 | 246 | 246.5 | 264 |
R | 100 | 100 | 100 | 100 | 100 | 110 |
Note1:When installing, use Fuji Technology made Multi-Clump. In case of using other Clumps, there are some cases where installing is impossible owing to their shape.
Note2:A motor position type enters in ( ) of form. (It chooses from four positions)
<Option>MBV-LDⅡ-MP (Multi-position control)
1.Motor encoder extension cable
Cables for connecting the servo amplifier and valveModel No. length(L) MOT/ENC cable_4122202(1m) 1m MOT/ENC cable_4122204(2m) 2m MOT/ENC cable_4122206(3m) 3m MOT/ENC cable_4122208(4m) 4m MOT/ENC cable_4122210(5m) 5m MOT/ENC cable_4122218(6m) 9m MOT/ENC cable_4122220(10m) 10m MOT/ENC cable_4122230(15m) 15m MOT/ENC cable_4122240(20m) 20m Motor cableEncoder cable2.Power parallel cable
Cable for power supply to servo amplifierModel No. length(L) Power parallel cable _4122306 (3m) 3m Power parallel cable _4122310 (5m) 5m Power parallel cable _4122320 (10m) 10m 3.-1 PC software
Model No. Remarks TBVST-CTC-JP-SET_4122040 Japanese version TBVST-CTC-EN-SET_4122041 English version 【PC software Standard set accessories】
① ADP-1(Conversion adapter)
② ADP-2-4(Connector converter)
③ SIO cable (1m)
④ ADP cable (1m)3.-2Teaching box
Model No. Remarks CTA-23-SET_4122070 Digital indication 【Teaching box Standard set accessories】
① ADP cable (1m)※The case lack of the connection length by a standard set accessory cable of 3-1 and 3-2 common option
(1m), Please select the cable length of the table below .(option)SIO cable Model length(L) SIO cable _4120606 (3m) 3m SIO cable _4120610 (5m) 5m ADP cable Model length(L) ADP cable_4122406 (3m) 3m ADP cable_4122410 (5m) 5m ADP cable_4122420 (10m) 10m