High-Perfomance Moter Drive Butterfly Valves MBV-LDⅡ-AZ Series

Long-life, Low-price, High performance, Versatile running patterns
1.Long-life | 1,000,000 cycles and two years guarantee |
---|---|
2.Low-price | Automatic pressure control is made low-priced |
3.High-performance | Employs a high-performance stepping motor driver |
4.High-functionality | Full closing, Multi-position control, Auto pressure control Equipped with an ABZO sensor, realizing a battery-less absolute system Motor position-selected (four-position) |
select from four types
MBV-LDⅡ-AZ-R
MBV-LDⅡ-AZ-L
MBV-LDⅡ-AZ-F
MBV-LDⅡ-AZ-B
Features
- Full closing (shut-off valve) and conductance adjustment can be done by one unit.
Minimum conductance-controlled is possible. - This valve can easily be opened under a differential pressure condition of vacuum-atmospheric pressure.
- The stop position accuracy can be reproduced easily by adopting “Highly precise Gear head”.
- In addition to fully closed and fully open, it can be stopped at any position of up to 14 positions. Position setting
can be easily performed by installing support software on a PC. - By adding optional components for control, automatic pressure control valve can be used as.
- The valve disc position can be confirmed from the outside by its angle indicator.
- The ability to select the motor position can be flexible to a variety of layouts, and utilize the space to install the
exhaust system. - Fully closed position detecting sensor be included as standard.
- Optional motor with brake is also available. (Model: MBV-LDII-AZBr)
Basic specification
STD FLANGE | JIS・ISO・CF・NW |
---|---|
Leak Rate | 1×10-9 Pa・m3/s > |
Pressure Range | 105 ~ 10-6 Pa |
Disk seal | Viton O-ring |
Shaft seal | Viton O-ring two-tier |
Gas contact material |
SUS304 |
Diameter | 20A ~ 300A※1 |
---|---|
Driven mechanism |
Hybrid control system αSTEP ※2 |
Power | DC power supply DC24V/DC48V 3.45A(3.7A)※4 AC power supply ※3 Single-phase AC100-120V 5.4A Single-phase AC200-240V 3.3A Three-phase AC200-240V 2.0A |
・Subject to change without any notice
・Please contact us as we can manufacture special sizes and special specifications.
※1 Diameter 150 A or higher is not compatible with DC power. AC power only.
※2 Hybrid control system αSTEP: Oriental Motor’s unique control that combines the advantages of “open-loop control” and “closed-loop control”
※3 Drivers with AC power specifications require a separate DC24V (0.25A) power supply for the control circuit.
※4 ( )Figures in parentheses are current values when a braked motor is used.
System configuration

Attachment driver dimensional drawing

Valve model
◆Standard motor specifications
・MBV-□LDⅡ-AZ-△-KD Power input:DC24V/DC48V
・MBV-□LDⅡ-AZ-△-AD Power input:Single-phase AC100-120V
・MBV-□LDⅡ-AZ-△-CD Power input:Single-phase/Three-phase AC 200-240V
Motor specification with brake
・MBV-□LDⅡ-AZBr-△-KD Power input:DC24V/DC48V
・MBV-□LDⅡ-AZBr-△-AD Power input:AC 単相100-120V
・MBV-□LDⅡ-AZBr-△-CD Power input:AC 単相/三相200-240V
□:Flange type and diameter △:Motor mounting position(R・L・F・B)
Dimensions of MBV-JIS LDⅡ-AZ Series

Unit in:mm | |||||||||
Model | MBV-1LDⅡ-AZ-□□ | MBV-2LDⅡ-AZ-□□ | MBV-2.5LDⅡ-AZ-□□ | MBV-3LDⅡ-AZ-□□ | MBV-4LDⅡ-AZ-□□ | MBV-6LDⅡ-AZ-□□ | MBV-8LDⅡ-AZ-□□ | MBV-10LDⅡ-AZ-□□ | MBV-12LDⅡ-AZ-□□ |
MOD No. | 10705□□ | 10707□□ | 10708□□ | 10709□□ | 10710□□ | 10711□□ | 10712□□ | 10713□□ | 10714□□ |
A | 20 | 20 | 20 | 20 | 20 | 26 | 40 | 40 | 45 |
B | 34 | 52 | 68 | 81 | 104 | 158 | 209 | 258 | 308 |
C | 58 | 88 | 105 | 120 | 145 | 190 | 250 | 302 | 352 |
D | 90 | 120 | 145 | 160 | 185 | 235 | 300 | 350 | 400 |
n—E | 4-φ10 | 4-φ10 | 4-φ12 | 4-φ12 | 8-φ12 | 8-φ12 | 8-φ15 | 12-φ15 | 12-φ15 |
F | 70 | 100 | 120 | 135 | 160 | 210 | 270 | 320 | 370 |
G | 33 | 52 | 67 | 80 | 102 | 154 | 206 | 254 | 303 |
H | 228.5 | 259 | 284.5 | 298.5 | 324 | 388 | 455 | 505 | 555 |
J | 115.5 | 130.5 | 143 | 150.5 | 163 | 194 | 229 | 254 | 279 |
K | 43 | 58.5 | 71.5 | 78 | 91 | 116.5 | 148.5 | 173.5 | 198.5 |
L | 55 | 55 | 49 | 49 | 55 | 70 | 85 | 85 | 85 |
M | 271.5 | 271.5 | 272.5 | 272.5 | 273 | 290.5 | 291 | 291.5 | 291.5 |
P | 40 | 70 | 85 | 100 | 120 | 175 | 225 | 275 | 325 |
Q | 5 | 5 | 5 | 5 | 5 | 5 | 8 | 8 | 8 |
R | 100 | 100 | 100 | 100 | 100 | 110 | 110 | 110 | 110 |
V | V40 | V70 | V85 | V100 | V120 | V175 | V225 | V275 | V325 |
Note1:The above Flanges are accordance with older JIS B2290 Vacuum Flange for Vacuum Equipment
(Flange for affiliated book maintenance)
※ To improve this specification may change without notice.
Dimensions of MBV-ISO LDⅡ-AZ Series

Unit in:mm | ||||||||
Model | MBV-ISO40LDⅡ-AZ-□□ | MBV-ISO50LDⅡ-AZ-□□ | MBV-ISO63LDⅡ-AZ-□□ | MBV-ISO80LDⅡ-AZ-□□ | MBV-ISO100LDⅡ-AZ-□□ | MBV-ISO160LDⅡ-AZ-□□ | MBV-ISO200LDⅡ-AZ-□□ | MBV-ISO250LDⅡ-AZ-□□ |
MOD No. | 10765□□ | 10766□□ | 10767□□ | 10767□□ | 10768□□ | 10770□□ | 10771□□ | 10772□□ |
A | 30 | 30 | 30 | 30 | 30 | 50 | 50 | 50 |
B | 34 | 52 | 68 | 81 | 104 | 158 | 209 | 258 |
C | 100 | 110 | 130 | 145 | 165 | 225 | 285 | 335 |
D | 120 | 120 | 145 | 160 | 185 | 235 | 300 | 350 |
n—E | 4-φ9 | 4-φ9 | 4-φ9 | 8-φ9 | 8-φ9 | 8-φ11 | 12-φ11 | 12-φ11 |
F | 80 | 90 | 110 | 125 | 145 | 200 | 260 | 310 |
G | 23 | 47 | 62 | 76 | 100 | 148 | 203 | 251 |
H | 259 | 259 | 284.5 | 298.5 | 324 | 388 | 455 | 505 |
J | 130.5 | 130.5 | 143 | 150.5 | 163 | 194 | 229 | 254 |
K | 58.5 | 58.5 | 71.5 | 78 | 91 | 116.5 | 148.5 | 173.5 |
L | 55 | 55 | 49 | 49 | 55 | 70 | 85 | 85 |
M | 271.5 | 271.5 | 272.5 | 272.5 | 273 | 290.5 | 291 | 291.5 |
R | 100 | 100 | 100 | 100 | 100 | 110 | 110 | 110 |
Note1:The above Flanges are accordance with ISO 1609 Vacuum technology Flange
Note2:A motor position type enters in ( ) of form. (It chooses from four positions)
※ To improve this specification may change without notice.
Dimensions of MBV-CF LDⅡ-AZ Series

Unit in:mm | ||||||
Model | MBV-CF40LDⅡ-AZ-□□ | MBV-CF63LDⅡ-AZ-□□ | MBV-CF100LDⅡ-AZ-□□ | MBV-CF160LDⅡ-AZ-□□ | MBV-CF200LDⅡ-AZ-□□ | MBV-CF250LDⅡ-AZ-□□ |
MOD No. | 10740□□ | 10742□□ | 10744□□ | 10745□□ | 10747□□ | 10748□□ |
A | 30 | 30 | 30 | 50 | 50 | 50 |
B | 34 | 52 | 104 | 158 | 209 | 258 |
C | 69.4 | 113.5 | 151.6 | 202.4 | 253.2 | 305.0 |
D | 90 | 120 | 185 | 235 | 300 | 350 |
n—E | 6-M6 | 8-M8 | 16-M8 | 20-M8 | 24-M8 | 32-M8 |
F | 58.7 | 92.1 | 130.2 | 181 | 231.8 | 284 |
G | 23 | 47 | 100 | 148 | 203 | 251 |
H | 228.5 | 259 | 324 | 388 | 455 | 505 |
J | 115.5 | 130.5 | 163 | 194 | 229 | 254 |
K | 43 | 58.5 | 91 | 116.5 | 148.5 | 173.5 |
L | 55 | 55 | 55 | 70 | 85 | 85 |
M | 271.5 | 271.5 | 273 | 290.5 | 291 | 291.5 |
R | 100 | 100 | 100 | 110 | 110 | 110 |
Note1:The above Flanges are accordance with ISO/TS 3669-2 Vacuum technology-Bakable
flanges-Part2:Dimension of knife-edge flanges
Note2:A motor position type enters in ( ) of form. (It chooses from four positions)
Note3:No Groove for leakage detection no CF 40
Note4:MBV-CF160~CF250LDII does not support DC power supply.
※ To improve this specification may change without notice.
Dimensions of MBV-NW LDⅡ-AZ Series

Unit in:mm | ||||||
Model | MBV-NW40LDⅡ-AZ-□□ | MBV-NW50LDⅡ-AZ-□□ | MBV-NW63LDⅡ-AZ-□□ | MBV-NW80LDⅡ-AZ-□□ | MBV-NW100LDⅡ-AZ-□□ | MBV-NW160LDⅡ-AZ-□□ |
MOD No. | 10724□□ | 10725□□ | 10726□□ | 10727□□ | 10728□□ | 10730□□ |
A | 40 | 40 | 40 | 60 | 60 | 66 |
B | 34 | 52 | 68 | 81 | 104 | 158 |
D | 55 | 75 | 87 | 114 | 134 | 190 |
G | 0 | 36 | 56 | 55 | 84 | 140 |
H | 228.5 | 259 | 284.5 | 298.5 | 324 | 388 |
J | 115.5 | 130.5 | 143 | 150.5 | 163 | 194 |
K | 43 | 58.5 | 71.5 | 78 | 91 | 116.5 |
L | 55 | 55 | 49 | 49 | 55 | 70 |
M | 271.5 | 271.5 | 272.5 | 272.5 | 273 | 290.5 |
R | 100 | 100 | 100 | 100 | 100 | 110 |
Note1:When installing, use Fuji Technology made Multi-Clump. In case of using other Clumps, there are some cases where installing is impossible owing to their shape.
Note2:A motor position type enters in ( ) of form. (It chooses from four positions)
Note3:MBV-NW160LDII does not support DC power supply.
※ To improve this specification may change without notice.
Dimensions of MBV-JIS LDⅡ-AZBr Series

Unit in:mm | |||||||||
Model | MBV-1LDⅡ-AZBr-□□ | MBV-2LDⅡ-AZBr-□□ | MBV-2.5LDⅡ-AZBr-□□ | MBV-3LDⅡ-AZBr-□□ | MBV-4LDⅡ-AZBr-□□ | MBV-6LDⅡ-AZBr-□□ | MBV-8LDⅡ-AZBr-□□ | MBV-10LDⅡ-AZBr-□□ | MBV-12LDⅡ-AZBr-□□ |
MOD No. | 10705□□ | 10707□□ | 10708□□ | 10709□□ | 10710□□ | 10711□□ | 10712□□ | 10713□□ | 10714□□ |
A | 20 | 20 | 20 | 20 | 20 | 26 | 40 | 40 | 45 |
B | 34 | 52 | 68 | 81 | 104 | 158 | 209 | 258 | 308 |
C | 58 | 88 | 105 | 120 | 145 | 190 | 250 | 302 | 352 |
D | 90 | 120 | 145 | 160 | 185 | 235 | 300 | 350 | 400 |
n—E | 4-φ10 | 4-φ10 | 4-φ12 | 4-φ12 | 8-φ12 | 8-φ12 | 8-φ15 | 12-φ15 | 12-φ15 |
F | 70 | 100 | 120 | 135 | 160 | 210 | 270 | 320 | 370 |
G | 33 | 52 | 67 | 80 | 102 | 154 | 206 | 254 | 303 |
H | 228.5 | 259 | 284.5 | 298.5 | 324 | 388 | 455 | 505 | 555 |
J | 115.5 | 130.5 | 143 | 150.5 | 163 | 194 | 229 | 254 | 279 |
K | 43 | 58.5 | 71.5 | 78 | 91 | 116.5 | 148.5 | 173.5 | 198.5 |
L | 55 | 55 | 49 | 49 | 55 | 70 | 85 | 85 | 85 |
M | 317.5 | 317.5 | 318.5 | 318.5 | 319 | 336.5 | 337 | 337.5 | 337.5 |
P | 40 | 70 | 85 | 100 | 120 | 175 | 225 | 275 | 325 |
Q | 5 | 5 | 5 | 5 | 5 | 5 | 8 | 8 | 8 |
R | 100 | 100 | 100 | 100 | 100 | 110 | 110 | 110 | 110 |
V | V40 | V70 | V85 | V100 | V120 | V175 | V225 | V275 | V325 |
Note1:The above Flanges are accordance with older JIS B2290 Vacuum Flange for Vacuum Equipment
(Flange for affiliated book maintenance)
※ To improve this specification may change without notice.
Dimensions of MBV-ISO LDⅡ-AZBr Series

Unit in:mm | ||||||||
Model | MBV-ISO40LDⅡ-AZBr-□□ | MBV-ISO50LDⅡ-AZBr-□□ | MBV-ISO63LDⅡ-AZBr-□□ | MBV-ISO80LDⅡ-AZBr-□□ | MBV-ISO100LDⅡ-AZBr-□□ | MBV-ISO160LDⅡ-AZBr-□□ | MBV-ISO200LDⅡ-AZBr-□□ | MBV-ISO250LDⅡ-AZBr-□□ |
MOD No. | 10765□□ | 10766□□ | 10767□□ | 10767□□ | 10768□□ | 10770□□ | 10771□□ | 10772□□ |
A | 30 | 30 | 30 | 30 | 30 | 50 | 50 | 50 |
B | 34 | 52 | 68 | 81 | 104 | 158 | 209 | 258 |
C | 100 | 110 | 130 | 145 | 165 | 225 | 285 | 335 |
D | 120 | 120 | 145 | 160 | 185 | 235 | 300 | 350 |
n—E | 4-φ9 | 4-φ9 | 4-φ9 | 8-φ9 | 8-φ9 | 8-φ11 | 12-φ11 | 12-φ11 |
F | 80 | 90 | 110 | 125 | 145 | 200 | 260 | 310 |
G | 23 | 47 | 62 | 76 | 100 | 148 | 203 | 251 |
H | 259 | 259 | 284.5 | 298.5 | 324 | 388 | 455 | 505 |
J | 130.5 | 130.5 | 143 | 150.5 | 163 | 194 | 229 | 254 |
K | 58.5 | 58.5 | 71.5 | 78 | 91 | 116.5 | 148.5 | 173.5 |
L | 55 | 55 | 49 | 49 | 55 | 70 | 85 | 85 |
M | 317.5 | 317.5 | 318.5 | 318.5 | 319 | 336.5 | 337 | 337.5 |
R | 100 | 100 | 100 | 100 | 100 | 110 | 110 | 110 |
Note1:The above Flanges are accordance with ISO 1609 Vacuum technology Flange
Note2:A motor position type enters in ( ) of form. (It chooses from four positions)
※ To improve this specification may change without notice.
Dimensions of MBV-CF LDⅡ-AZBr Series

Unit in:mm | ||||||
Model | MBV-CF40LDⅡ-AZBr-□□ | MBV-CF63LDⅡ-AZBr-□□ | MBV-CF100LDⅡ-AZBr-□□ | MBV-CF160LDⅡ-AZBr-□□ | MBV-CF200LDⅡ-AZBr-□□ | MBV-CF250LDⅡ-AZBr-□□ |
MOD No. | 10740□□ | 10742□□ | 10744□□ | 10745□□ | 10747□□ | 10748□□ |
A | 30 | 30 | 30 | 50 | 50 | 50 |
B | 34 | 52 | 104 | 158 | 209 | 258 |
C | 69.4 | 113.5 | 151.6 | 202.4 | 253.2 | 305.0 |
D | 90 | 120 | 185 | 235 | 300 | 350 |
n—E | 6-M6 | 8-M8 | 16-M8 | 20-M8 | 24-M8 | 32-M8 |
F | 58.7 | 92.1 | 130.2 | 181 | 231.8 | 284 |
G | 23 | 47 | 100 | 148 | 203 | 251 |
H | 228.5 | 259 | 324 | 388 | 455 | 505 |
J | 115.5 | 130.5 | 163 | 194 | 229 | 254 |
K | 43 | 58.5 | 91 | 116.5 | 148.5 | 173.5 |
L | 55 | 55 | 55 | 70 | 85 | 85 |
M | 317.5 | 317.5 | 319 | 336.5 | 337 | 337.5 |
R | 100 | 100 | 100 | 110 | 110 | 110 |
Note1:The above Flanges are accordance with ISO/TS 3669-2 Vacuum technology-Bakable flanges-Part2:Dimension of knife-edge flanges
Note2:A motor position type enters in ( ) of form. (It chooses from four positions)
Note3:No Groove for leakage detection no CF 40
Note4:MBV-CF160~CF250LDII does not support DC power supply.
※ To improve this specification may change without notice.
Dimensions of MBV-NW LDⅡ-AZBr Series

Unit in:mm | ||||||
Model | MBV-NW40LDⅡ-AZBr-□□ | MBV-NW50LDⅡ-AZBr-□□ | MBV-NW63LDⅡ-AZBr-□□ | MBV-NW80LDⅡ-AZBr-□□ | MBV-NW100LDⅡ-AZBr-□□ | MBV-NW160LDⅡ-AZBr-□□ |
MOD No. | 10724□□ | 10725□□ | 10726□□ | 10727□□ | 10728□□ | 10730□□ |
A | 40 | 40 | 40 | 60 | 60 | 66 |
B | 34 | 52 | 68 | 81 | 104 | 158 |
D | 55 | 75 | 87 | 114 | 134 | 190 |
G | 0 | 36 | 56 | 55 | 84 | 140 |
H | 228.5 | 259 | 284.5 | 298.5 | 324 | 388 |
J | 115.5 | 130.5 | 143 | 150.5 | 163 | 194 |
K | 43 | 58.5 | 71.5 | 78 | 91 | 116.5 |
L | 55 | 55 | 49 | 49 | 55 | 70 |
M | 317.5 | 317.5 | 318.5 | 318.5 | 319 | 336.5 |
R | 100 | 100 | 100 | 100 | 100 | 110 |
Note1:When installing, use Fuji Technology made Multi-Clump. In case of using other Clumps, there are some cases where installing is impossible owing to their shape.
Note2:A motor position type enters in ( ) of form. (It chooses from four positions)
Note3:MBV-NW160LDII does not support DC power supply.
※ To improve this specification may change without notice.